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微机械扫描镜的特点：此系列的微机械扫描镜分为1D和2D产品，即根据其其扫描轴为单轴或双轴而不同。此类微光机电光束扫描镜也被称为微扫描镜或者微光机电光束偏转器。
The mirror plate of the microscanner performs a continuous, harmonic oscillation. The oscillation is excited electrostatically and utilizes planar electrostatic comb drives. The oscillation-frequency has to be close to the natural frequency of the scanning axis. Adjusting the driving voltage or the driving frequency allows setting and controlling the
oscillation amplitude. For 2D devices, the mirror plate is gimbal-mounted. The resonance frequency of each axis is determined by design independently. Each axis is excited individually. Thus, the ratio of the oscillation amplitudes and the phase difference can be set and controlled arbitrarily.
的Technical Properties
| Mirror Motion | harmonic oscillation |
|---|---|
| Scan Frequencies | depending on configuration type and design parameters 100 Hz - 50 kHz |
| Drive Signal | A square wave voltage input signal is required which can be generated with standard laboratory equipment - a power supply unit is not in standard scope of delivery with VarioS®-microscanner-demonstrators. 1D- VarioS®-microscanner-demonstrators can be delivered with the Laser Deflection Cube as an option. Alternatively customer specific drive electronics and system designs can be delivered as result of a research and development project from Fraunhofer IPMS. |
| Amplitude | up to ±29° maximum mechanical deflection, amplitude controllable via electrode voltage and input pulse frequency |
| Drive Mode | electrostatic-resonant |
| Drive | planar comb electrodes with out-of plane motion |
| 2D Axis Configuration | gimballed |
| Position Sensors | no position sensor integrated |
| Mirror Shape | circular |
| Mirror Diameter / 1D-Microscanner | 0.5 - 3 mm |
| Mirror Diameter / 2D-Microscanner | 0.5 - 2 mm |
| Mirror Reflectance | dependent on wavelength of light source, approx. 80-92% （see Fig. 1）for visible range |
| Chip Dimensions | 5370 µm x 4540 µm |
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